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Low-Temperature Poly-Si TFT Charge Trap Flash Memory with Sputtered ONO and Schottky Junctions

Title 
Low-Temperature Poly-Si TFT Charge Trap Flash Memory with Sputtered ONO and Schottky Junctions
Authors 
김주연( Jooyeon Kim )
Authors 
안호명( Ho Myoung An )
Keywords 
Low-temperature polycrystalline silicon, TFT, Ni-silicide, SB junction, Schottky barrier, Thin film transistor, LTPS, CTF, Charge-trap flash
Issue Date 
2015
Publisher 
한국전기전자재료학회
Journal 
Trans. Electr. Electron. Mater. (TEEM)
Vol. 
16
Issue 
4
Pages 
187 ~ 189
URI 
http://kiss.kstudy.com/search/detail_page.asp?key=3348633
http://repository.uc.ac.kr/handle/2014.oak/2129
ISSN 
1229-7607
Appears in Collections
15. 전기전자공학부 > 연구논문

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