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Inductively coupled-plasma Dry etching of a ZnO Thin film by Ar-diluted CF4 Gas

Title 
Inductively coupled-plasma Dry etching of a ZnO Thin film by Ar-diluted CF4 Gas
Authors 
Do Young Kim
Authors 
Hwang, I; Son, J.; Kim, H.
Issue Date 
2011
Publisher 
Korean physical society
Journal 
Journal korean physical society
Vol. 
58
Issue 
5
Pages 
1536-1540
URI 
http://repository.uc.ac.kr/handle/2014.oak/564
ISSN 
0374-4884
Appears in Collections
15. 전기전자공학부 > 연구논문

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